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Characterization of titanium nitride thin films
H.Z. Wu, T.C. Chou, A. Mishra, D.R. Anderson, J.K. Lampert, S.C. GujrathiVolume:
191
Year:
1990
Language:
english
Pages:
13
DOI:
10.1016/0040-6090(90)90274-h
File:
PDF, 769 KB
english, 1990