Mechanism of buried β-SiC formation by implanted carbon in silicon
K.J. Reeson, J. Stoemenos, P.L.F. HemmentVolume:
191
Year:
1990
Language:
english
Pages:
18
DOI:
10.1016/0040-6090(90)90280-q
File:
PDF, 2.89 MB
english, 1990