Investigations on cubic Ti(B,N) films prepared by reactive...

Thin Solid Films 1990 Vol. 188; Iss. 2

Investigations on cubic Ti(B,N) films prepared by reactive diode R.F. sputtering from a TiB2 target

E. Selbach, K. Schmidt, M. Wang
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Volume:
188
Year:
1990
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(90)90289-p
File:
PDF, 391 KB
english, 1990
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