Coverage measurement in the submonolayer range by in-situ ellipsometry
S. Andrieu, F. Beck, F. Arnaud d'AvitayaVolume:
184
Year:
1990
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(90)90401-x
File:
PDF, 374 KB
english, 1990