Performance and processing line integration of a silicon molecular beam epitaxy system
A.A. Van Gorkum, G.F.A. Van de Walle, R.A. Van den Heuvel, D.J. Gravesteijn, C.W. FredrikszVolume:
184
Year:
1990
Language:
english
Pages:
13
DOI:
10.1016/0040-6090(90)90415-a
File:
PDF, 633 KB
english, 1990