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Kinetics of the chemical reaction between dichlorosilane and ammonia during silicon nitride film deposition
G. Peev, L. Zambov, Y. YanakievVolume:
189
Year:
1990
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(90)90456-n
File:
PDF, 464 KB
english, 1990