Breakdown of SiO2 thin films grown in dry O2

Thin Solid Films 1990 Vol. 192; Iss. 1

Breakdown of SiO2 thin films grown in dry O2

M. Badila, C. Pavelescu, O. Popa
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Volume:
192
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(90)90473-q
File:
PDF, 243 KB
english, 1990
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