Reactively ion plated TiN: Effects of r.f. power density on the structure and electrochemical properties
R.T. Carson, J.H. Givens, H.S. Savage, Y.W. Lee, J.M. Rigsbee, W.J. CroisantVolume:
204
Year:
1991
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(91)90070-e
File:
PDF, 819 KB
english, 1991