R.F. planar magnetron sputtered ZnO films II: Electrical...

R.F. planar magnetron sputtered ZnO films II: Electrical properties

F.R. Blom, F.C.M. van de Pol, G. Bauhuis, Th.J.A. Popma
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Volume:
204
Year:
1991
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(91)90075-9
File:
PDF, 559 KB
english, 1991
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