Structures of low-angle subgrain and grain boundaries in silicon-on-insulator layers
An.L. Vasiliev, Al.L. Vasiliev, S.N. Kolyadenko, E.V. OrlovaVolume:
202
Year:
1991
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(91)90096-g
File:
PDF, 1.19 MB
english, 1991