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Auger electron spectroscopy and low energy electron loss spectroscopy investigations of plasma- nitrided thin thermal SiO2 and native oxide on silicon
E.D. Atanassova, A.V. ShopovVolume:
202
Year:
1991
Language:
english
Pages:
16
DOI:
10.1016/0040-6090(91)90098-i
File:
PDF, 748 KB
english, 1991