![](/img/cover-not-exists.png)
Preparation of SixCyHz films from methylsilane by plasma-enhanced chemical vapor deposition
M.P. Delplancke, J.M. Powers, G.J. Vandentop, G.A. SomorjaiVolume:
202
Year:
1991
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(91)90100-c
File:
PDF, 494 KB
english, 1991