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The effect of microstructure on the resistance to electromigration of AlCu thin film conductors
A.J. Patrinos, J.A. SchwarzVolume:
196
Year:
1991
Language:
english
Pages:
17
DOI:
10.1016/0040-6090(91)90173-u
File:
PDF, 1.04 MB
english, 1991