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X-ray elastic constants, stress profiling and composition of physically vapor deposited ZrN films
R.Y. Fillit, A.J. Perry, C. StrandbergVolume:
197
Year:
1991
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(91)90220-r
File:
PDF, 566 KB
english, 1991