Thermal stability and interface bowing of submicron TiSi2/polycrystalline silicon
H. Norström, K. Maex, P. VandenabeeleVolume:
198
Year:
1991
Language:
english
Pages:
14
DOI:
10.1016/0040-6090(91)90324-q
File:
PDF, 810 KB
english, 1991