SiGe materials characterized by high resolution Raman spectroscopy and spectroscopic ellipsometry
P. Evrard, J.L. Stehle, C. Pickering, R.T. CarlineVolume:
222
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(92)90041-9
File:
PDF, 300 KB
english, 1992