UV-assisted oxidation of SiGe strained layers

UV-assisted oxidation of SiGe strained layers

V. Cracium, A.H. Reader, W. Kersten, J. Timmers, D.J. Gravesteijn, I.W. Boyd
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Volume:
222
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(92)90056-h
File:
PDF, 448 KB
english, 1992
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