UV-assisted oxidation of SiGe strained layers
V. Cracium, A.H. Reader, W. Kersten, J. Timmers, D.J. Gravesteijn, I.W. BoydVolume:
222
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(92)90056-h
File:
PDF, 448 KB
english, 1992