Linearization methods of laser interferometers for pico/nano positioning stages
Podżorny, Tomasz, Budzyń, Grzegorz, Rzepka, JanuszVolume:
124
Language:
english
Journal:
Optik - International Journal for Light and Electron Optics
DOI:
10.1016/j.ijleo.2013.05.054
Date:
December, 2013
File:
PDF, 925 KB
english, 2013