![](/img/cover-not-exists.png)
Fracture strength and biaxial modulus measurement of plasma silicon nitride films
G.F. Cardinale, R.W. TustisonVolume:
207
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(92)90112-o
File:
PDF, 386 KB
english, 1992