Oxidation of molybdenum silicide thin film temperature sensors
C.H. Ho, S. Prakash, H.J. Doerr, C.V. Deshpandey, R.F. BunshahVolume:
207
Year:
1992
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(92)90141-w
File:
PDF, 685 KB
english, 1992