Internal stress analysis in diamond films formed by d.c....

Thin Solid Films 1992 Vol. 215; Iss. 2

Internal stress analysis in diamond films formed by d.c. plasma chemical vapour deposition

Wang Wanlu, Liao Kejun, Gao Jinying, Liu Aimin
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Volume:
215
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(92)90433-c
File:
PDF, 427 KB
english, 1992
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