Effects of an AlN nucleation layer on magnetron-sputtered indium nitride films
W.A. Bryden, J.S. Morgan, R. Fainchtein, T.J. KistenmacherVolume:
213
Year:
1992
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(92)90479-u
File:
PDF, 1.71 MB
english, 1992