Effect of diluent gases added during deposition on the...

Thin Solid Films 1992 Vol. 212; Iss. 1-2

Effect of diluent gases added during deposition on the etching characteristics of diamond-like carbon films

Jayshree Seth, Raghunath Padiyath, Suryadevara V. Babu, Moses David
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
212
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(92)90529-k
File:
PDF, 444 KB
english, 1992
Conversion to is in progress
Conversion to is failed