Chemical vapor deposition of novel electronic materials...

Chemical vapor deposition of novel electronic materials from carbon disulfide

Clifford L. Spiro, William F. Banholzer, Daniel S. McAtee
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Volume:
220
Year:
1992
Language:
english
Pages:
3
DOI:
10.1016/0040-6090(92)90559-t
File:
PDF, 285 KB
english, 1992
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