Fluorinated polymer films from r.f. plasmas containing...

Thin Solid Films 1992 Vol. 220; Iss. 1-2

Fluorinated polymer films from r.f. plasmas containing benzene and sulfur hexafluorine

Steven F. Durrant, Rogério P. Mota, Mario A.B. de Moraes
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Volume:
220
Year:
1992
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(92)90588-3
File:
PDF, 781 KB
english, 1992
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