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Electron and ion radiation damage of a-C:H films detected by energy loss spectroscopy of reflected and transmitted electrons
A. Fuchs, K. Jung, H. Ehrhardt, I. Mühling, K. BreuerVolume:
217
Year:
1992
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(92)90604-a
File:
PDF, 694 KB
english, 1992