Epitaxial growth of monoclinic and cubic ZrO2 on Si(100)...

Thin Solid Films 1992 Vol. 217; Iss. 1-2

Epitaxial growth of monoclinic and cubic ZrO2 on Si(100) without prior removal of the native SiO2

A. Lubig, Ch. Buchal, D. Guggi, C.L. Jia, B. Stritzker
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Volume:
217
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(92)90617-k
File:
PDF, 446 KB
english, 1992
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