![](/img/cover-not-exists.png)
IR characterization of thermal SiO2 layers
Yu.A. Pusep, A.H. Milekhin, L.L. VasiljevaVolume:
209
Year:
1992
Language:
english
Pages:
2
DOI:
10.1016/0040-6090(92)90671-w
File:
PDF, 160 KB
english, 1992