Electronic properties of plasma-deposited films prepared from tetramethylsilane
J. Tyczkowski, E. Odrobina, P. Kazimierski, H. Bässler, A. Kisiel, N. ZemaVolume:
209
Year:
1992
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(92)90682-2
File:
PDF, 714 KB
english, 1992