Thickness measurements of thin films: comparison of...

Thickness measurements of thin films: comparison of techniques using characteristic X-ray line ratio techniques

Kerry W. Habiger, Charles Stein
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Volume:
215
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(92)90710-s
File:
PDF, 599 KB
english, 1992
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