On the chemical and mechanical properties of sputtered...

On the chemical and mechanical properties of sputtered silicon nitride films

F. Jansen, A. Day, L. Wamboldt
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Volume:
219
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(92)90734-s
File:
PDF, 653 KB
english, 1992
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