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Deposition of ZrC thin films and plasma-polymerized hydrocarbon films in the reactive magnetron sputtering process
Masaaki Yoshitake, Toshikazu Nosaka, Akio Okamoto, Soichi Ogawa, Kazuhiro NishikawaVolume:
221
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(92)90798-g
File:
PDF, 609 KB
english, 1992