Effect of hydrogen on hot electron energy relaxation in...

Effect of hydrogen on hot electron energy relaxation in SiO2 and Si3N4 films

D.G. Esaev, V.M. Efimov, A.A. Shklyaev
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Volume:
221
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(92)90810-x
File:
PDF, 490 KB
english, 1992
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