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ArF excimer laser chemical vapor deposition a-Si:H/a-AlxO1−x superlattices
K. Uwasawa, F. Ishihara, S. MatsumotoVolume:
218
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(92)90904-p
File:
PDF, 443 KB
english, 1992