Spectroscopic ellipsometry studies on ion beam sputter deposited Pb(Zr, Ti)O3 films on sapphire and Pt-coated silicon substrates
S. Trolier-McKinstry, H. Hu, S.B. Krupanidhi, P. Chindaudom, K. Vedam, R.E. NewnhamVolume:
230
Year:
1993
Language:
english
Pages:
13
DOI:
10.1016/0040-6090(93)90341-l
File:
PDF, 1.32 MB
english, 1993