Effects of magnetic field on the target erosion in the...

Effects of magnetic field on the target erosion in the symmetrical magnets magnetron sputtering method

Qi-hua Fan, Hong-you Chen
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Volume:
229
Year:
1993
Language:
english
Pages:
3
DOI:
10.1016/0040-6090(93)90356-t
File:
PDF, 177 KB
english, 1993
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