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The role of gas-phase nucleation in the preparation of TiO2 films by chemical vapor deposition
Hae-Yong Lee, Ho-Gin KimVolume:
229
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(93)90362-s
File:
PDF, 1.07 MB
english, 1993