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Effect of deposition parameters on the properties of amorphous silicon-germanium alloy films grown by the photo-CVD method
Abhijit De, Swati Ray, A.K. BaruaVolume:
229
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(93)90367-x
File:
PDF, 576 KB
english, 1993