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Improvement of the crystalline quality of an yttria-stabilized zirconia film on silicon by a new deposition process in reactive sputtering
Susumu Horita, Toshiyuki Tajima, Masakazu Murakawa, Takaharu Fujiyama, Tomonobu HataVolume:
229
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(93)90402-b
File:
PDF, 933 KB
english, 1993