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Growth and characterization of thin SiN films grown on Si by electron cyclotron resonance nitrogen plasma treatment
Jong Moon, Toshimichi Ito, Akio HirakiVolume:
229
Year:
1993
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(93)90414-k
File:
PDF, 677 KB
english, 1993