Growth and characterization of thin SiN films grown on Si...

Growth and characterization of thin SiN films grown on Si by electron cyclotron resonance nitrogen plasma treatment

Jong Moon, Toshimichi Ito, Akio Hiraki
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Volume:
229
Year:
1993
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(93)90414-k
File:
PDF, 677 KB
english, 1993
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