![](/img/cover-not-exists.png)
In and ex situ diagnostics of the growth of α-Ti thin films deposited by plasma-enhanced physical vapour deposition
H. Steffen, H. Wulff, A. LunkVolume:
228
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(93)90577-c
File:
PDF, 513 KB
english, 1993