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Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD
J.C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J.Y. Parey, V.A. YakovlevVolume:
236
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(93)90642-3
File:
PDF, 594 KB
english, 1993