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Kinetics and conformality of TiN films from TDEAT and ammonia
T.S. Cale, M.B. Chaara, G.B. Raupp, I.J. RaaijmakersVolume:
236
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(93)90685-i
File:
PDF, 714 KB
english, 1993