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Study of sputtered molybdenum nitride as a diffusion barrier
V.P. Anitha, A. Bhattacharya, Nitin G. Patil, S. MajorVolume:
236
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(93)90687-k
File:
PDF, 413 KB
english, 1993