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Properties of reactively sputter-deposited TaN thin films
Xin Sun, Elzbieta Kolawa, Jen-Sue Chen, Jason S. Reid, Marc-A. NicoletVolume:
236
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(93)90694-k
File:
PDF, 478 KB
english, 1993