Three-dimensional simulation of an isolation trench refill...

Thin Solid Films 1993 Vol. 236; Iss. 1-2

Three-dimensional simulation of an isolation trench refill process

Hung Liao, Timothy S. Cale
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Volume:
236
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(93)90695-l
File:
PDF, 849 KB
english, 1993
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