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Effect of oxygen pressure from 10−9 to 10−6 Torr on the friction of sputtered MoSx films
Donald R. WheelerVolume:
223
Year:
1993
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(93)90730-d
File:
PDF, 2.43 MB
english, 1993