Spin-on silicon dioxide films on indium antimony

Thin Solid Films 1993 Vol. 223; Iss. 1

Spin-on silicon dioxide films on indium antimony

N.V. Gaponenko, V.E. Borisenko, L.P. Mileshko, H. Gnaser, V.V. Vasiliev
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Volume:
223
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(93)90735-8
File:
PDF, 624 KB
english, 1993
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