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Depth profiling of porous silicon layers by attenuated total reflection spectroscopy
W. Theiβ, M. Wernke, V. OffermannVolume:
255
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(94)05650-3
File:
PDF, 426 KB
english, 1995