Constructive versus destructive effects of electron beam...

Constructive versus destructive effects of electron beam irradiation: an application to plasma nitridation of SiO2 thin films

A. Glachant
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Volume:
254
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(94)06243-e
File:
PDF, 806 KB
english, 1995
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